{
"$type": "site.standard.document",
"description": "A microelectromechanical device comprising a first proof mass and a second proof mass in a device plane. The first proof mass comprises a first set of rotor combs, and the first set of rotor combs comprises a first set of rotor transducer combs. The second proof mass comprises a second set of rotor…",
"path": "/patents/1387925",
"publishedAt": "2026-03-25T00:00:00.000Z",
"site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
"tags": [
"G01C19/5712",
"MURATA MANUFACTURING CO [JP]"
],
"textContent": "A microelectromechanical device comprising a first proof mass and a second proof mass in a device plane. The first proof mass comprises a first set of rotor combs, and the first set of rotor combs comprises a first set of rotor transducer combs. The second proof mass comprises a second set of rotor combs, and the second set of rotor combs comprises a second set of rotor transducer combs. The first and second proof masses are configured to undergo anti-phase movement. The first set of rotor combs also comprises a first set of dummy rotor combs and the second set of rotor combs also comprises a second set of dummy rotor combs. The first set of rotor combs is reflection-symmetric with the second set of rotor combs.",
"title": "SYMMETRIC DIFFERENTIAL TRANSDUCER"
}