MEMS GYROSCOPE SENSING IN-PLANE ROTATIONS

A MEMS gyroscope for sensing rotational motion about an in-plane extending axis includes a body, a primary in-plane oscillator, a secondary in-plane oscillator and an out-of-plane oscillator. The primary in-plane oscillator includes an actuator element and is suspended from a primary anchor region on the body by a first spring system. The secondary in-plane oscillator is connected to the primary in-plane oscillator by a drive coupling spring system and is suspended from one or more secondary anchor points on the substrate by a second spring system. The out-of-plane oscillator is connected to the secondary in-plane oscillator by a third spring system. The drive coupling spring has higher rigidity in the first in-plane direction than in the out-of-plane direction, and the first spring system has higher rigidity in the first in-plane direction than the second spring system.