{
  "$type": "site.standard.document",
  "description": "A MEMS gyroscope for sensing rotational motion about an in-plane extending axis includes a body, a primary in-plane oscillator, a secondary in-plane oscillator and an out-of-plane oscillator. The primary in-plane oscillator includes an actuator element and is suspended from a primary anchor region…",
  "path": "/patents/1356555",
  "publishedAt": "2023-12-21T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5712",
    "Murata Manufacturing Co., Ltd."
  ],
  "textContent": "A MEMS gyroscope for sensing rotational motion about an in-plane extending axis includes a body, a primary in-plane oscillator, a secondary in-plane oscillator and an out-of-plane oscillator. The primary in-plane oscillator includes an actuator element and is suspended from a primary anchor region on the body by a first spring system. The secondary in-plane oscillator is connected to the primary in-plane oscillator by a drive coupling spring system and is suspended from one or more secondary anchor points on the substrate by a second spring system. The out-of-plane oscillator is connected to the secondary in-plane oscillator by a third spring system. The drive coupling spring has higher rigidity in the first in-plane direction than in the out-of-plane direction, and the first spring system has higher rigidity in the first in-plane direction than the second spring system.",
  "title": "MEMS GYROSCOPE SENSING IN-PLANE ROTATIONS"
}