CALIBRATION SCALE, CALIBRATION METHOD AND APPARATUS, AND DETECTION METHOD AND APPARATUS

A calibration scale includes a scale body and at least two calibration pattern subsets arranged on the scale body along a first direction. The at least two calibration pattern subsets include a plurality of first calibration blocks arranged at spacings along the first direction and staggered along a second direction. Projections of the plurality of first calibration blocks in each calibration pattern subset along the first direction have a first overlapping area. Projections of at least two first overlapping areas along the first direction have a second overlapping area.