STRUCTURE, PHYSICAL QUANTITY SENSOR, INERTIAL SENSOR, AND METHOD FOR MANUFACTURING STRUCTURE

DRIVE February 29, 2024
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A structure is a structure of a quartz crystal substrate having a slit. The structure includes, as an inner wall of the slit, a first side surface, a second side surface, a first end surface, and a second end surface. The first side surface extends along a first direction which is a longitudinal direction of the slit, and the second side surface extends along the first direction. The first end surface is continuous with the first side surface and extends along a first crystal plane of the quartz crystal substrate, and the second end surface is continuous with the second side surface and extends along a second crystal plane of the quartz crystal substrate. In a plan view of the quartz crystal substrate, an intersection point where a first straight line corresponding to the first end surface and a second straight line corresponding to the second end surface intersect each other is located inside the quartz crystal substrate.

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