Micro-Electromechanical System

A micro-electromechanical system () comprising: a sensor device (), with a measuring deformer () exhibiting an effective temperature T; a high-frequency resonator () that is mechanically coupled to the sensor device () and can interact with the measuring deformer (); an energy converter () that is operatively connected to the high-frequency resonator () and is configured to excite the high-frequency resonator () into a vibration state, wherein, through the interaction of the vibrating high-frequency resonator () with the measuring deformer (), energy can be transferred from the measuring deformer () to the high-frequency resonator () in such a manner that the measuring deformer () after the energy transfer exhibits an effective temperature T lower than T