{
  "$type": "site.standard.document",
  "description": "A micro-electromechanical system () comprising: a sensor device (), with a measuring deformer () exhibiting an effective temperature T; a high-frequency resonator () that is mechanically coupled to the sensor device () and can interact with the measuring deformer (); an energy converter () that is…",
  "path": "/patents/1364515",
  "publishedAt": "2024-06-06T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B81B3/0081",
    "Technische Universität Wien"
  ],
  "textContent": "A micro-electromechanical system () comprising: a sensor device (), with a measuring deformer () exhibiting an effective temperature T; a high-frequency resonator () that is mechanically coupled to the sensor device () and can interact with the measuring deformer (); an energy converter () that is operatively connected to the high-frequency resonator () and is configured to excite the high-frequency resonator () into a vibration state, wherein, through the interaction of the vibrating high-frequency resonator () with the measuring deformer (), energy can be transferred from the measuring deformer () to the high-frequency resonator () in such a manner that the measuring deformer () after the energy transfer exhibits an effective temperature T lower than T",
  "title": "Micro-Electromechanical System"
}