Inertial sensor and intertial measurement unit
DRIVE
June 2, 2026
An inertial sensor includes: a base including a mount and a mount; a lid including a conductive member; and a sensor element coupled to the mount, the mount, and the conductive member. The sensor element includes a conductor bonded to the mount through a bonding part and coupled to the conductive member, a movable electrode including electrode fingers electrically coupled to the conductor, and a supporter provided between the movable electrode and the conductor and bonded to the mount through a bonding part. The supporter includes, in a plan view, a first part of the supporter overlapping the bonding part, and a second part of the supporter not overlapping the bonding part. The second part of the supporter is formed with a slit serving as a first through hole.
Discussion in the ATmosphere