{
"$type": "site.standard.document",
"description": "An inertial sensor includes: a base including a mount and a mount; a lid including a conductive member; and a sensor element coupled to the mount, the mount, and the conductive member. The sensor element includes a conductor bonded to the mount through a bonding part and coupled to the conductive…",
"path": "/patents/1374421",
"publishedAt": "2026-06-02T00:00:00.000Z",
"site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
"tags": [
"G01C21/16",
"SEIKO EPSON CORPORATION"
],
"textContent": "An inertial sensor includes: a base including a mount and a mount; a lid including a conductive member; and a sensor element coupled to the mount, the mount, and the conductive member. The sensor element includes a conductor bonded to the mount through a bonding part and coupled to the conductive member, a movable electrode including electrode fingers electrically coupled to the conductor, and a supporter provided between the movable electrode and the conductor and bonded to the mount through a bonding part. The supporter includes, in a plan view, a first part of the supporter overlapping the bonding part, and a second part of the supporter not overlapping the bonding part. The second part of the supporter is formed with a slit serving as a first through hole.",
"title": "Inertial sensor and intertial measurement unit"
}