THREE-AXIS YAW RATE SENSOR COMRISING A SENSOR SUBSTRATE AND A DOUBLE ROTOR AND A FIRST SPRING STRUCTURE AND A SECOND SPRING STRUCTURE

A three-axis yaw rate sensor. The sensor includes a sensor substrate, a double rotor, and a first and a second spring structure, the substrate having a main extension plane, the main extension plane being spanned by an X-axis and a Y-axis oriented perpendicularly to the X-axis, a Z-axis being oriented perpendicularly to the main extension plane, the double rotor having a first and a second rotor, the first rotor having a first and a second seismic mass, the second rotor having a third and fourth seismic mass, the first rotor being connected to the sensor substrate via a first substrate connection, the second rotor being connected to the sensor substrate via a second substrate connection, the first rotor being connected to the second rotor via the first spring structure in such a way that a first mechanical coupling is present between the first and the second rotor.