SYSTEMS AND METHODS FOR MONITORING THIN FILM SUBSTRATE MANUFACTURING PROCESSES

DRIVE March 26, 2026
Source
Systems, methods, and other embodiments described herein relate to monitoring the manufacturing processes of thin film substrates to detect anomalies in the manufacturing process. In one embodiment, a method includes identifying, from an output of the sensor, a tension-induced feature on a surface of the thin film substrate that is under tension in a manufacturing system. The method also includes detecting that the manufacturing system is in a fault state based on a characteristic of the tension-induced feature and executing a remedial action responsive to the manufacturing system being in the fault state.

Discussion in the ATmosphere

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