METAL CHLORIDE PRECURSORS AND DEPOSITION OF METAL-CONTAINING FILMS

A method for forming a metal-containing film comprises: wherein, M is a transition metal, a rare earth element, an alkali metal, or an alkaline earth metal; R, R, R, Rand Reach are independently selected from a hydrogen atom, a Cto Clinear or branched alkyl-group, a Cto Ccyclic alkyl- group, or F, Si, Ge containing Cto Clinear and branched alkyl chain; x and y are integers; provided that x+y equals to the oxidation state of M.