MECHANICALLY AMPLIFIED HIGH-PRECISION, HIGH-STABILITY ANGULAR RATE SENSORS

Architectures and methods of structuring high-precision, high-stability MEMS-based angular rate sensors are provided. The structures include implements that allow the suppression of in-phase movement of the coupled masses, the mechanical enhancement of the drive movement in the driving blocks and the mechanical enhancement of the Coriolis-induced movement in the sensing blocks. Compared to the prior art, the presented architectures minimise the mechanical momenta generated by the actuation forces with the drive, sense and Q-compensation blocks. Furthermore, methods include several implements for the purpose of achieving stress-decoupling between the MEMS device and the environment and the reduction of the anchor damping.