{
  "$type": "site.standard.document",
  "description": "Architectures and methods of structuring high-precision, high-stability MEMS-based angular rate sensors are provided. The structures include implements that allow the suppression of in-phase movement of the coupled masses, the mechanical enhancement of the drive movement in the driving blocks and…",
  "path": "/patents/1381372",
  "publishedAt": "2026-04-23T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5621",
    "Shanghai Roadix Technology Co., Ltd"
  ],
  "textContent": "Architectures and methods of structuring high-precision, high-stability MEMS-based angular rate sensors are provided. The structures include implements that allow the suppression of in-phase movement of the coupled masses, the mechanical enhancement of the drive movement in the driving blocks and the mechanical enhancement of the Coriolis-induced movement in the sensing blocks. Compared to the prior art, the presented architectures minimise the mechanical momenta generated by the actuation forces with the drive, sense and Q-compensation blocks. Furthermore, methods include several implements for the purpose of achieving stress-decoupling between the MEMS device and the environment and the reduction of the anchor damping.",
  "title": "MECHANICALLY AMPLIFIED HIGH-PRECISION, HIGH-STABILITY ANGULAR RATE SENSORS"
}