Micro-electro-mechanical sensor with force feedback loop
DRIVE
February 8, 2006
A micro-electro-mechanical sensor includes a microstructure (102), having a mass (108), which is movable with respect to a rest position (Y 0 ), according to a predetermined degree of freedom (Y); and a displacement-detecting device (104, 106) for detecting a displacement of the mass (108) according to the predetermined degree of freedom (Y). The displacement-detecting device (104, 106) includes a force feedback loop (106) of a purely analog type, which supplies electrostatic forces tending to bring back the mass into the rest position (Y 0 ), in response to a displacement of the mass (108) itself according to the predetermined degree of freedom (Y).
Discussion in the ATmosphere