{
  "$type": "site.standard.document",
  "description": "A micro-electro-mechanical sensor includes a microstructure (102), having a mass (108), which is movable with respect to a rest position (Y 0 ), according to a predetermined degree of freedom (Y); and a displacement-detecting device (104, 106) for detecting a displacement of the mass (108)…",
  "path": "/patents/1070178",
  "publishedAt": "2006-02-08T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5726",
    "ST MICROELECTRONICS SRL [IT]"
  ],
  "textContent": "A micro-electro-mechanical sensor includes a microstructure (102), having a mass (108), which is movable with respect to a rest position (Y 0 ), according to a predetermined degree of freedom (Y); and a displacement-detecting device (104, 106) for detecting a displacement of the mass (108) according to the predetermined degree of freedom (Y). The displacement-detecting device (104, 106) includes a force feedback loop (106) of a purely analog type, which supplies electrostatic forces tending to bring back the mass into the rest position (Y 0 ), in response to a displacement of the mass (108) itself according to the predetermined degree of freedom (Y).",
  "title": "Micro-electro-mechanical sensor with force feedback loop"
}