Plurality of integrated piping plate for constituting a 3D module

An integrated piping plate composed of two or more plates joined together, and in which an instrument and a component constituting an apparatus are disposed, or the instrument is disposed, or the component is disposed, on one of or both of surfaces of the integrated piping plate. Grooves for serving as channels for fluids are formed in joining surfaces of the plates, and the instrument and the component are connected, or the instrument is connected, or the component is connected, by the grooves. A plurality of the integrated piping plates are provided, and the plurality of the integrated piping plates are integrally fixed, with back surfaces of the plurality of the integrated piping plates being superposed, to constitute a three-dimensional module. With such piping plate an apparatus using the plates can be downsized, the channels and control system for fluids can be shortened, response can be accelerated and control can be facilitated.