Balanced angular accelerometer

A balanced angular accelerometer (10;110) is provided having a substrate (60), a fixed electrode (20A) with a plurality of fixed capacitive plates (24), and a rotational inertia mass (12) with a central opening (13) and substantially suspended over a cavity (34) and including a plurality of movable capacitive plates (14) arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates (24). The accelerometer (10) has a central member (15) and an outer member (18) fixed to the substrate (60). According to one embodiment, a plurality of inner support arms (16A-16D) extend between the central member (15) and the inertia mass (12) and a plurality of outer support arms (40A-40D) extend between the inertia mass (12) and the outer member (18) to support the mass (12) over the cavity (34).