{
  "$type": "site.standard.document",
  "description": "A foreign object inspection device is provided. The device reduces the risk of a failure to detect a foreign object. A direction normal to a principal surface is inclined with respect to a direction in which an intensity of electromagnetic waves emitted from an electromagnetic wave generating…",
  "path": "/patents/1245099",
  "publishedAt": "2019-10-03T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01N23/04",
    "Sumitomo Chemical Company, Limited"
  ],
  "textContent": "A foreign object inspection device is provided. The device reduces the risk of a failure to detect a foreign object. A direction normal to a principal surface is inclined with respect to a direction in which an intensity of electromagnetic waves emitted from an electromagnetic wave generating source is greatest.",
  "title": "FOREIGN OBJECT INSPECTION DEVICE AND FOREIGN OBJECT INSPECTION METHOD"
}