{
  "$type": "site.standard.document",
  "description": "A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes…",
  "path": "/patents/1245100",
  "publishedAt": "2019-10-03T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01P15/0802",
    "Seiko Epson Corporation"
  ],
  "textContent": "A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes, in a plan view, a first mass that is located on one side of a second direction with respect to the rotation axis, and a second mass that is located on the other side. Each of the first mass and the second mass has a plurality of through-holes which penetrate through the movable body and each of which has a square shape as an opening shape. When damping is indicated by C, and a minimum value of the damping is indicated by Cmin, C≤1.5≤Cmin.",
  "title": "PHYSICAL QUANTITY SENSOR, PHYSICAL QUANTITY SENSOR DEVICE, COMPOSITE SENSOR DEVICE, INERTIAL MEASUREMENT UNIT, VEHICLE POSITIONING APPARATUS, PORTABLE ELECTRONIC APPARATUS, ELECTRONIC APPARATUS, AND VEHICLE"
}