PHYSICAL QUANTITY SENSOR, COMPOSITE SENSOR, INERTIAL MEASUREMENT UNIT, VEHICLE POSITIONING DEVICE, PORTABLE ELECTRONIC DEVICE, ELECTRONIC DEVICE, VEHICLE, TRAVELING SUPPORTING SYSTEM, AND DISPLAY DEVICE
DRIVE
December 19, 2019
An acceleration sensor functioning as a physical quantity sensor includes an acceleration sensor element including a substrate, a lid joined to the substrate to form a housing space in the inside, and an acceleration sensor element piece housed in the housing space and capable of detecting a physical quantity, and a circuit element bonded to, by an adhesive material, an upper surface on the opposite side of the acceleration sensor element piece side of the lid. A recess is provided along the outer edge of the lid in an outer edge region of the upper surface of the lid.
Discussion in the ATmosphere