{
  "$type": "site.standard.document",
  "description": "An improved design for a microelectromechanical device that enables multi-axis detection but is also more robust in demanding operating conditions. The device has a balanced structure formed of two oscillating inertial masses, coupled in a way that optimally utilizes inherent stiffnesses of spring…",
  "path": "/patents/1259947",
  "publishedAt": "2020-04-23T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5712",
    "MURATA MANUFACTURING CO., LTD."
  ],
  "textContent": "An improved design for a microelectromechanical device that enables multi-axis detection but is also more robust in demanding operating conditions. The device has a balanced structure formed of two oscillating inertial masses, coupled in a way that optimally utilizes inherent stiffnesses of spring structures to increase robustness of the combined device structure.",
  "title": "MICROELECTROMECHANICAL DEVICE FOR DETECTION OF ROTATIONAL MOTION"
}