{
  "$type": "site.standard.document",
  "description": "A three-axis micro electro mechanical system (MEMS) gyroscope includes a central anchor, a first subsidiary proof mass, a first decoupling structure, a second subsidiary proof mass and a third subsidiary proof mass arranged in order from the inside out. When the first subsidiary proof mass…",
  "path": "/patents/1263037",
  "publishedAt": "2020-05-28T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5712",
    "SENODIA TECHNOLOGIES (SHANGHAI) CO., LTD."
  ],
  "textContent": "A three-axis micro electro mechanical system (MEMS) gyroscope includes a central anchor, a first subsidiary proof mass, a first decoupling structure, a second subsidiary proof mass and a third subsidiary proof mass arranged in order from the inside out. When the first subsidiary proof mass resonates in a driving mode around a third direction, the first subsidiary proof mass approximately moves along the first direction. When the first subsidiary proof mass is subjected to an angular velocity around a second direction, a Coriolis force is generated along the third direction, and the first subsidiary proof mass produces a displacement around the first direction under the effect of the Coriolis force. The axis of the first decoupling structure is also in the first direction.",
  "title": "THREE-AXIS MEMS GYROSCOPE"
}