{
  "$type": "site.standard.document",
  "description": "A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate…",
  "path": "/patents/1275267",
  "publishedAt": "2020-10-29T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B60K35/00",
    "Seiko Epson Corporation"
  ],
  "textContent": "A vibration device includes a base substrate made of silicon and having a first surface and a second surface facing away from the first surface, a lid bonded to the base substrate, a vibrator disposed at the first surface of the base substrate and accommodated in a space between the base substrate and the lid, and a thermistor element disposed at the base substrate.",
  "title": "Vibration Device, Electronic Apparatus, And Vehicle"
}