SUBSTRATE-DECOUPLED HIGH-CORIOLIS-COUPLING PITCH/ROLL GYROSCOPE

DRIVE March 4, 2021
Source
A microelectromechanical resonator includes a resonator member suspended over a surface of a substrate by at least one anchor that is connected to the substrate. The resonator member includes outer and inner frames that are concentrically arranged and mechanically coupled by support structures extending therebetween. Related apparatus and gyroscopes are also discussed.

Discussion in the ATmosphere

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