{
  "$type": "site.standard.document",
  "description": "A gyro sensor includes a plurality of beams connected via a turnaround part. A groove is provided on a main surface of at least one beam of the plurality of beams. Wall thicknesses on the main surface of two sidewalls facing each other of the groove in a direction orthogonal to a longitudinal…",
  "path": "/patents/1291859",
  "publishedAt": "2021-06-03T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/574",
    "Seiko Epson Corporation"
  ],
  "textContent": "A gyro sensor includes a plurality of beams connected via a turnaround part. A groove is provided on a main surface of at least one beam of the plurality of beams. Wall thicknesses on the main surface of two sidewalls facing each other of the groove in a direction orthogonal to a longitudinal direction of the beam satisfy 0.9≤T1/T2≤1.1, where T1 is the wall thickness of one sidewall and T2 is the wall thickness of the other sidewall.",
  "title": "Inertial Sensor, Method For Manufacturing Inertial Sensor, Inertial Measurement Unit, Portable Electronic Apparatus, Electronic Apparatus, And Vehicle"
}