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"description": "In a multi-axial angular velocity sensor, a substrate part perpendicular to a D3 axis includes a pair of long sides parallel to a D2 axis and a pair of short sides parallel to a D1 axis. Three sensor elements for the three axes are mounted on an upper surface of the substrate part. A piezoelectric…",
"path": "/patents/1418612",
"publishedAt": "2023-04-19T00:00:00.000Z",
"site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
"tags": [
"G01C19/005",
"KYOCERA CORP [JP]"
],
"textContent": "In a multi-axial angular velocity sensor, a substrate part perpendicular to a D3 axis includes a pair of long sides parallel to a D2 axis and a pair of short sides parallel to a D1 axis. Three sensor elements for the three axes are mounted on an upper surface of the substrate part. A piezoelectric body of each of the sensor elements comprises a plurality of arms. Theses arms extend in a predetermined direction of extension in a plane perspective of the upper surface. The piezoelectric body has the direction of extension as its long direction. Two of the three sensor element are arranged side by side in a direction along the short sides of the substrate part with orientations so that the directions of extension become parallel to the long sides. A remaining one is arranged in a direction along the long sides relative to the two elements with an orientation so that the direction of extension becomes parallel to the short sides.",
"title": "MULTI-AXIAL ANGULAR VELOCITY SENSOR"
}