MEMS GYROSCOPE SENSITIVITY COMPENSATION

The present invention relates to a MEMS gyroscope and a method for compensating drift of sensitivity of a MEMS gyroscope. The method performed by circuitry of the MEMS gyroscope comprises demodulating an angular rate signal with an in-phase carrier signal for producing a raw rate signal, obtaining a DC test signal by processing the angular rate signal or by further processing the raw rate signal, low-pass filtering the DC test signal for obtaining a raw test signal, and zeroing offset of the raw test signal by comparing each sample of the raw test signal to a test signal normalization value for producing an offset zeroed test signal that represents a deviation of the sample of the raw test signal from the test signal normalization value. The method further comprises determining a sensitivity compensation multiplier on basis of the offset zeroed test signal and a predefined gain coefficient and compensating drift of sensitivity by multiplying the raw rate signal with the sensitivity compensation multiplier for providing a sensitivity compensated rate signal.