{
  "$type": "site.standard.document",
  "description": "A MEMS inertial sensor including: a supporting structure; an inertial structure, which includes at least one inertial mass; an elastic structure, which is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction…",
  "path": "/patents/1417992",
  "publishedAt": "2024-04-24T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B81B3/0018",
    "ST MICROELECTRONICS SRL [IT]"
  ],
  "textContent": "A MEMS inertial sensor including: a supporting structure; an inertial structure, which includes at least one inertial mass; an elastic structure, which is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction; and a stopper structure, fixed with respect to the supporting structure and including at least one primary stopper element and one secondary stopper element . If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.",
  "title": "MEMS INERTIAL SENSOR WITH HIGH RESILIENCE TO THE PHENOMENON OF STICTION"
}