SLOT DIE COATER

DRIVE June 17, 2026
Source
A slot die coater includes a slot die including a first slot and a second slot, the first slot being configured to discharge a block coating solution, the second slot being configured to discharge a slurry, and the first slot and the second slot being aligned in an order of a movement direction of a substrate, a first spacer in the first slot, the first spacer including a plurality of first slits spaced apart by a predetermined distance, and a second spacer in the second slot, the second spacer including a second slit positioned to correspond to a space between the plurality of first slits.

Discussion in the ATmosphere

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