{
  "$type": "site.standard.document",
  "description": "The physical quantity sensor includes a movable body oscillating around an oscillation axis, and a detection electrode disposed so as to be opposed to the movable body. The substrate has a first area through an m-th area, and the detection electrode is disposed so as to straddle the first area…",
  "path": "/patents/1303198",
  "publishedAt": "2021-10-28T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01P15/08",
    "Seiko Epson Corporation"
  ],
  "textContent": "The physical quantity sensor includes a movable body oscillating around an oscillation axis, and a detection electrode disposed so as to be opposed to the movable body. The substrate has a first area through an m-th area, and the detection electrode is disposed so as to straddle the first area through an n-th area. When setting a first imaginary straight line which is the smallest in an angle formed with an X-axis direction out of imaginary straight lines connecting two of end parts on respective areas of the first area through the n-th area of the detection electrode, and a second imaginary straight line extending along a principal surface located at the substrate side of the movable body in a state in which the movable body makes a maximum displacement around the oscillation axis, the first imaginary straight line and the second imaginary straight line fail to cross each other in an area between a first normal line which passes the end part of the first area, and which extends in the Z-axis direction, and a second normal line which passes the end part in the n-th area, and which extends in the Z-axis direction.",
  "title": "Physical Quantity Sensor, Electronic Apparatus, and Vehicle"
}