{
  "$type": "site.standard.document",
  "description": "A microelectromechanical gyroscope includes: the support structure (6); a sensing mass (3), coupled to the support structure (6) with degrees of freedom along a driving direction (DD) and a sensing direction (DS) perpendicular to each other; and a calibration structure (5) facing the sensing mass…",
  "path": "/patents/1409821",
  "publishedAt": "2024-04-17T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5712",
    "ST MICROELECTRONICS SRL [IT]"
  ],
  "textContent": "A microelectromechanical gyroscope includes: the support structure (6); a sensing mass (3), coupled to the support structure (6) with degrees of freedom along a driving direction (DD) and a sensing direction (DS) perpendicular to each other; and a calibration structure (5) facing the sensing mass (3) and separated from the sensing mass (3) by a gap (21) having an average width (W), the calibration structure (5) being movable with respect to the sensing mass (3) so that displacements of the calibration structure (5) cause variations in the average width (W) of the gap (21) . A calibration actuator (20, 30) controls a relative position of the calibration structure (5) with respect to the sensing mass (3) and the average width (W) of the gap (21).",
  "title": "MICROELECTROMECHANICAL GYROSCOPE AND METHOD FOR COMPENSATING AN OUTPUT THERMAL DRIFT IN A MICROELECTROMECHANICAL GYROSCOPE"
}