DRIVING CIRCUIT FOR CONTROLLING A MEMS OSCILLATOR OF RESONANT TYPE

Driving circuit (14) for controlling a MEMS oscillator (1), comprising: a digital conversion stage (20) to acquire a differential sensing signal (V) indicative of a displacement of a movable mass (7) of the MEMS oscillator (1), and to convert the differential sensing signal (V) of analog type into a digital differential signal (V) of digital type; a processing block (22) to generate a digital control signal (V) of digital type as a function of the comparison between the digital differential signal (V) and a differential reference signal (V) indicative of a target amplitude of oscillation of the movable mass (7) which causes the resonance of the MEMS oscillator (1); an analog conversion stage (24) comprising a ΣΔ DAC and configured to convert the digital control signal (V) into a PDM control signal (V) of analog type; and a filtering stage (26) of low-pass type to, by filtering the PDM control signal (V), generate a control signal (V) for controlling the amplitude of oscillation of the movable mass (7) .