{
  "$type": "site.standard.document",
  "description": "The present disclosure provides a control device for charging and auto teaching of a wafer type sensor, a control program executed by the control device, a wafer type sensor storage device, a wafer type sensor charging device, and a semiconductor device manufacturing facility. The control program…",
  "path": "/patents/1319643",
  "publishedAt": "2022-06-09T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01R31/36",
    "SEMES Co., Ltd."
  ],
  "textContent": "The present disclosure provides a control device for charging and auto teaching of a wafer type sensor, a control program executed by the control device, a wafer type sensor storage device, a wafer type sensor charging device, and a semiconductor device manufacturing facility. The control program is a program executed by a control device equipped with a processor, and monitors a semiconductor device manufacturing facility and its part using a wafer type sensor, and monitors the remaining battery level of the wafer type sensor.",
  "title": "CONTROL PROGRAM, CONTAINER AND SEMICONDUCTOR DEVICE MANUFACTURING SYSTEM FOR CHARGING OF WAFER TYPE SENSOR AND AUTO TEACHING"
}