{
  "$type": "site.standard.document",
  "description": "A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top…",
  "path": "/patents/1321489",
  "publishedAt": "2022-06-30T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01P1/023",
    "SEMES CO., LTD."
  ],
  "textContent": "A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.",
  "title": "BUFFER UNIT AND METHOD FOR STORAGING SUBSTRATE TYPE SENSEOR FOR MEASURING OF HORIZONTALITY OF A SUBSTRATE SUPPORT MEMBER PROVIDED ON A TEMPERATURE VARYING ATMOSPHERE"
}