COMPOUND AND METHOD FOR PRODUCING LITHIUM-CONTAINING FILM
DRIVE
July 21, 2022
The present invention provides a compound having a low melting point, enhanced volatility, and excellent thermal stability, and a method for producing a lithium-containing film. The compound is represented by the following formula (1). (In the formula (1), A is a nitrogen atom, a phosphorus atom, a boron atom, or an aluminum atom;
Discussion in the ATmosphere