COMPOUND AND METHOD FOR PRODUCING LITHIUM-CONTAINING FILM

DRIVE July 21, 2022
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The present invention provides a compound having a low melting point, enhanced volatility, and excellent thermal stability, and a method for producing a lithium-containing film. The compound is represented by the following formula (1). (In the formula (1), A is a nitrogen atom, a phosphorus atom, a boron atom, or an aluminum atom;

Discussion in the ATmosphere

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