{
  "$type": "site.standard.document",
  "coverImage": {
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  "description": "Aspects of the present disclosure are directed to monolithically integrating an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit with a MEMS accelerometer on the same die. The accelerometer can be controlled by electronic circuitry that controls the optical…",
  "path": "/patents/1329385",
  "publishedAt": "2022-10-13T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/721",
    "Anello Photonics, Inc."
  ],
  "textContent": "Aspects of the present disclosure are directed to monolithically integrating an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit with a MEMS accelerometer on the same die. The accelerometer can be controlled by electronic circuitry that controls the optical gyroscope. The optical gyroscope may have a microresonator ring or a multi-turn waveguide coil. Gaps may be introduced between adjacent waveguide turns to reduce cross-talk and improve sensitivity and packing density of the optical gyroscope.",
  "title": "INTEGRATION OF PHOTONICS OPTICAL GYROSCOPES WITH MICRO-ELECTRO-MECHANICAL SENSORS"
}