MEMS WAVE GYROSCOPE

The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M-1 first beam units by the nodes. The straight beam is divided into N-1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.