VIBRATING BEAM ACCELEROMETER

A proof mass assembly includes a monolithic substrate, the monolithic substrate including a proof mass, a proof mass support, and a flexure connecting the proof mass to the proof mass support. The proof mass is configured to rotate relative to the proof mass support via the flexure. The monolithic substrate further includes a first resonator connected to a first major surface of the proof mass and a first maj or surface of the proof mass support and a second resonator connected to a second major surface of the proof mass and a second major surface of the proof mass support.