METHOD OF MANUFACTURING SOLID STATE BATTERY CATHODES FOR USE IN BATTERIES

A method of manufacturing a battery cathode for a solid state battery is provided. The method includes generating a plasma remote from one or more targets suitable for forming cathodes, such as LiCoO, exposing the plasma target or targets to the plasma, thereby generating sputtered material from the target or targets, and depositing sputtered material on a first portion of a substrate, thereby forming crystalline material, such as LiCoOon the first portion of the substrate.