CONTROL CIRCUIT OF A MEMS GYROSCOPE, MEMS GYROSCOPE AND CONTROL METHOD
DRIVE
March 30, 2023
The control circuit for a MEMS gyroscope is configured to receive a measurement signal which has a quadrature component and a sensing component. The control circuit has: an input stage which acquires an input signal, generating an acquisition signal, where the input signal is a function of the measurement signal and of a quadrature cancellation signal; a processing stage which extracts a first component of the acquisition signal, indicative of the sensing component of the measurement signal and having a sensing frequency band; and a quadrature correction stage which extracts a second component of the acquisition signal, indicative of the quadrature component of the measurement signal, and generates the quadrature cancellation signal from a reference signal. The quadrature cancellation signal is a signal modulated as a function of the second component of the acquisition signal, at an update frequency which is outside the sensing frequency band.
Discussion in the ATmosphere