{
  "$type": "site.standard.document",
  "description": "A feeding apparatus and a substrate processing device are provided. The feeding apparatus (60) includes: a material conveying channel (61) including a feeding inlet (611) and a discharging outlet (612), where the feeding inlet (611) is closer to a first end (613) of the material conveying channel…",
  "path": "/patents/1392510",
  "publishedAt": "2025-12-31T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B05C19/06",
    "CONTEMPORARY AMPEREX TECHNOLOGY CO LTD [CN]"
  ],
  "textContent": "A feeding apparatus and a substrate processing device are provided. The feeding apparatus (60) includes: a material conveying channel (61) including a feeding inlet (611) and a discharging outlet (612), where the feeding inlet (611) is closer to a first end (613) of the material conveying channel (61) than the discharging outlet (612), and the discharging outlet (612) is closer to a second end (614) of the material conveying channel (61) than the feeding inlet (611), the first end (613) and the second end (614) being two opposite ends of the material conveying channel (61); and a vibration generator (62) disposed at the material conveying channel (61) and configured to generate mechanical vibration to induce the mechanical vibration of the feeding apparatus (60), and a material (50) entering the material conveying channel (61) through the feeding inlet (611) is conveyed to the discharging outlet (612) under the action of the mechanical vibration and falls out through the discharging outlet (612) under the action of gravity. Since the discharging is implemented through mechanical vibration, the feeding apparatus has better discharging consistency.",
  "title": "FEEDING APPARATUS AND SUBSTRATE PROCESSING DEVICE"
}