BINARY PHOSPHORUS NITRIDE PROTECTIVE SOLID ELECTROLYTE INTERMEDIARY STRUCTURES FOR ELECTRODE ASSEMBLIES

An intermediary solid electrolyte structure having a Li ion conducting solid electrolyte layer covered with a thin as-deposited lithium phosphorus nitride film. A surface protected solid electrolyte having a solid electrolyte layer having a first major surface that is covered by a composite protective film, the composite protective film having a lithium phosphorus material component and a phosphorus nitride material component. A physical vapor deposition target for the deposition of a composite protective film, the target having a compacted composite material target having a mosaic structure. Methods of making thin films.