CIRCUIT AND METHOD FOR DRIVING A MICRO-ELECTRO-MECHANICAL RESONATOR OF A GYROSCOPE WITH A REDUCED EXCITATION OF SPURIOUS HARMONICS
DRIVE
February 25, 2026
Driving circuit for a driving resonator stage (4) of a MEMS gyroscope (1) including at least a first and a second electrode (31,32) and a movable mass (20), the driving circuit (3A,3B) including: a synchronization stage (16) which receives an electrical position signal (sPOS1) indicative of the position of the movable mass (20) and generates a reference signal (sLOCK') phase- and frequency-locked with the electrical position signal (sPOSl); a driving stage (2) which generates, on the basis of the reference signal (sLOCK'), a first and a second driving signal (D1,D2), which are applied to the first and, respectively, the second electrodes (31,32), so that the movable mass (20) is subject to a first and a second electrostatic force which cause the movable mass (20) to oscillate. Each of the first and the second driving signals (Dl,D2) comprises, for each period of the reference signal (sLOCK'), a corresponding pulse, the pulses of the first and the second driving signals (Dl,D2) being temporally alternated and having a same duration (α*T), the ratio (α) between the duration and the period (T) of the reference signal (sLOCK') falling in the range [0.3-0.37] or in the range [0.63-0.7].
Discussion in the ATmosphere