ANODES FOR LITHIUM-BASED ENERGY STORAGE DEVICES

Methods of making an anode for a lithium-based energy storage device such as a lithium-ion battery are disclosed. Methods may include providing a current collector. The current collector may include an electrically conductive layer and a surface layer overlaying over the electrically conductive layer. The surface layer may have an average thickness of at least 0.002 μm. The surface layer may include a metal chalcogenide including at least one of sulfur or selenium. Methods may include depositing a continuous porous lithium storage layer onto the surface layer by a PECVD process. The continuous porous lithium storage layer may have an average thickness in a range of 4 μm to 30 μm and comprises at least 85 atomic % amorphous silicon.