{
  "$type": "site.standard.document",
  "description": "An inertial sensor including a substrate, a first pair of proof masses sensitive to rotation movements occurring around a first direction and a third direction, a second pair of proof masses sensitive to rotation movements occurring around a second direction and the third direction, an excitation…",
  "path": "/patents/1348167",
  "publishedAt": "2023-07-27T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5705",
    "COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES"
  ],
  "textContent": "An inertial sensor including a substrate, a first pair of proof masses sensitive to rotation movements occurring around a first direction and a third direction, a second pair of proof masses sensitive to rotation movements occurring around a second direction and the third direction, an excitation device, four frames, a rotatable frame and a sensing system connected to the rotatable frame. This inertial sensor is characterized in that the excitation device is configured to force the first pair of proof masses and the second pair of proof masses into a motion going towards and away from the sensing system, and wherein the readout of the rotation movements occurring in each of the three directions is achieved with piezoelectric gauges.",
  "title": "3-AXIS GYROSCOPE WITH IMPROVED PERFORMANCE"
}