MICRO-OSCILLATOR, METHOD OF MANUFACTURING MICRO-OSCILLATOR, AND APPARATUS FOR PROCESSING MICRO-OSCILLATOR

A method of manufacturing a micro-oscillator includes: preparing a substrate having a flat portion and a curved surface portion formed in a three-dimensional curved shape protruding from one surface of the flat portion, the curved surface portion being surrounded by the flat portion; and irradiating an outer surface of the curved surface portion with a laser beam to separate the curved surface portion from the flat portion.