{
  "$type": "site.standard.document",
  "description": "A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable…",
  "path": "/patents/1355858",
  "publishedAt": "2023-12-07T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "H01L21/67724",
    "Taiwan Semiconductor Manufacturing Co., Ltd."
  ],
  "textContent": "A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable cleanroom stocker is configured to maintain cleanroom conditions within the portable cleanroom stocker during transportation.",
  "title": "SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEM"
}