PLASMA GENERATION DEVICE

The present invention addresses the issue of improving generation efficiency of plasma in relation to usage power in a plasma generation apparatus. The present invention is directed to a plasma generation apparatus provided with an electromagnetic wave emission antenna and a discharge electrode. The plasma generation apparatus includes a plasma control device that controls generation of plasma, and is characterized that the plasma control device causes the electromagnetic wave emission antenna to intermittently emit electromagnetic waves by way of a drive sequence control. Especially, the plasma control device may preferably control an oscillating frequency, a power, output timing, a pulse width, a pulse cycle, and a duty cycle of the electromagnetic waves.