{
  "$type": "site.standard.document",
  "coverImage": {
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  "description": "A method includes: receiving an auxiliary routing request from a manufacturing execution system (MES) apparatus of a first site by an inter-site backup management apparatus; selecting an auxiliary route to a second site based on the auxiliary routing request and a statistical model by the…",
  "path": "/patents/1357373",
  "publishedAt": "2024-01-04T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C21/3415",
    "Taiwan Semiconductor Manufacturing Company Ltd."
  ],
  "textContent": "A method includes: receiving an auxiliary routing request from a manufacturing execution system (MES) apparatus of a first site by an inter-site backup management apparatus; selecting an auxiliary route to a second site based on the auxiliary routing request and a statistical model by the inter-site backup management apparatus; including the auxiliary route in a route associated with a wafer lot by the MES apparatus; and performing a semiconductor processing operation on a wafer of the wafer lot according to the route.",
  "title": "METHOD OF PERFORMING INTER-SITE BACKUP PROCESSING OF WAFER LOTS"
}